MULTI-WAVELENGTH ELLIPSOMETER
4th generation systems are now available!
The 4th generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvements in this generation are the additional wavelengths and spectral range for the FS-8 model, which further enhance the measurement capabilities over a wide range of thin film applications. The new systems offer the same benefits of the patented* Film Sense ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.
Gen. 4 Common Specifications
- Compact optics: Source 125 x 80 x 60 mm, Detector 110 x 80 x 60 mm
- Simple connections: +12V wall plug power supply, Ethernet, and Source-Detector link cables
- Motorized Source Polarizer:
– provides automated instrument calibration
– enables zone-averaged measurements, for improved measurement accuracy - 4x more intensity (compared to original FS-1), and updated detector electronics provide improved measurement precision: 2x for ex situ, 4x for in situ
Film Sense Ellipsometer Wavelengths
FS-4 Ellipsometer
- 4 wavelengths, 450 – 660 nm spectral range
(replaces the original FS-1) - Excellent choice for measuring single layer transparent films in the 0 – 2 μm thickness range, with precision down to 0.0004 nm
*US Patent #9,354,118
FS-8 Ellipsometer
- 8 wavelengths, 370 – 950 nm spectral range
-
The UV wavelength (370 nm) provides enhanced sensitivity when measuring very thin films < 10 nm
-
The 3 longer wavelengths (735, 850, and 950 nm) enable the measurement of thicker transparent films (up to 5 μm), and absorbing semiconductor films (such as poly-Si, SiGe, amorphous-Si, etc.)
- Film resistivity measurements (using the Drude model) are also improved with the 3 longer wavelengths.
- 8 wavelengths and wider spectral range provide enhanced measurement capability for multilayer film stacks
Standard Ex Situ Configuration
- 65° Angle of Incidence.
- Manual sample loading and height adjustment.
- Sample sizes up to 200 mm dia. and 20 mm in thickness.
- Sample tilt with +/-2° range.
- Beam size on sample: 4 x 9 mm.
- Compact footprint (180 x 400 mm) and light (5 kg).
Testimonials
“The FS1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. ”
Dr Ruy Sebastian Bonilla – Research Fellow
Oxford Materials Department
Focused Beam Ellipsometer Option
Fast and reliable thin film measurements in an easy-to-use, compact system. The Focus Beam option reduces beam size.
- Reduces beam size on sample to 0.8 x 1.9 mm or 0.25 x 0.55 mm.
Send Us Your Samples
As thin film applications are so varied and diverse, the best way to determine if a Film Sense Multi-Wavelength Ellipsometer is right for your application is to perform demonstration measurements on your actual samples. Please contact us to discuss your application, and arrange for sample measurements.
Send Us Your Samples
As thin film applications are so varied and diverse, the best way to determine if a Film Sense Multi-Wavelength Ellipsometer is right for your application is to perform demonstration measurements on your actual samples. Please contact us to discuss your application, and arrange for sample measurements.