MULTI-WAVELENGTH ELLIPSOMETER

Next generation ellipsometers are now available!

The next generation Film Sense Multi-Wavelength Ellipsometer systems are now available! Film Sense FS-1EX and FS-1UV ellipsometers provide enhanced thin film measurement capabilities, with more wavelengths and wider spectral ranges. New ellipsometer systems offer the same benefits of the patented* FS-1 ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.

Capabilities and Performance

Film Sense Multi-Wavelength ellipsometers excel at measuring the thickness and index of refraction of transparent single films. The upper thickness limit depends on the ellipsometer system (typically 2 – 5 μm), but is also dependent on the substrate and film optical constants. As with any ellipsometer system, a minimum film thickness (typically 10 nm) is required to obtain accurate index of refraction measurements.

Optically absorbing films can also be measured by Film Sense ellipsometers, but the data analysis becomes more complicated as the film optical constants (both n and k values) are required. Film Sense software contains multiple methods for determining n&k values: 1) multi-sample analysis, 2) combined ellipsometry + transmission measurements, and 3) dispersion models. The upper thickness limit for absorbing films is strongly dependent on the type of material; for metallic films, the upper limit is typically 50 nm.

Multi-Wavelength Ellipsometers can also be used to measure multilayer film stacks (in some cases up to 5 layers), depending on the thicknesses and indices of refraction of the layers. Simulations can be performed in the Film Sense software to determine if a particular sample structure is possible. For some samples, surface roughness and index gradients in the film can also be characterized.

To see the Features and Benefits that make Film Sense Multi-Wavelength Ellipsometers Innovative.

Ex Situ Ellipsometer Configuration

  • 65° Angle of Incidence.
  • Manual sample loading and height adjustment.
  • Sample sizes up to 200 mm dia. and 20 mm in thickness.
  • Sample tilt with +/-2° range.
  • Beam size on sample: 4 x 9 mm.
  • Compact footprint (180 x 400 mm) and light (4.8 kg).
FS-1 Compact Footprint Ellipsometer
FS-1 Compact Footprint Ellipsometer
Ellipsometry diagram

FS-1™ (Gen. 2) Ellipsometer

  • 4 wavelengths, replaces the original FS-1
  • Compact optics: Source and Detector 110 x 80 x 60 mm
  • Slightly wider spectral range (450 – 660 nm)
  • 4x more intensity (compared to original FS-1)
    • 2x improvement in precision
    • Easier in situ alignment
  • Excellent choice for measuring single layer transparent films in the 0 – 2 μm thickness range, with precision down to 0.001 nm

FS-1EX™ Ellipsometer

  • 6 wavelengths, 405 – 950 nm spectral range
  • Compact optics: Source 137 x 80 x 60 mm, Detector 110 x 80 x 60 mm
  • 4x more intensity (compared to original FS-1)
  • The 2 longer wavelengths (850 and 950 nm) enable the measurement of thicker transparent films (up to 5 μm), and absorbing semiconductor films (such as poly-Si, SiGe, amorphous-Si, etc.).
  • Film resistivity measurements (using the Drude model) are also improved with the 2 longer wavelengths.
  • 6 wavelengths and wider spectral range provide enhanced measurement capability for multilayer film stacks.

FS-1UV™ Ellipsometer

  • 6 wavelengths, 280 – 660 nm spectral range
  • Compact optics: Source 137 x 80 x 60 mm, Detector 110 x 80 x 60 mm
  • The UV wavelengths (280 and 305 nm) are above the bandgap of most semiconductors, which can provide enhanced sensitivity to composition
  • The UV wavelengths can also provide enhanced index of refraction contrast for transparent substrates and films

Testimonials

“The FS1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. ”

Dr Ruy Sebastian Bonilla – Research Fellow
Oxford Materials Department

FS-1 Compact Footprint Ellipsometer

Focused Beam Ellipsometer Option

Fast and reliable thin film measurements in an easy-to-use, compact system. The Focus Beam option reduces beam size.
 

  • Reduces beam size on sample to 0.8 x 1.9 mm or 0.3 x 0.7 mm.

Send Us Your Samples

As thin film applications are so varied and diverse, the best way to determine if a Film Sense Multi-Wavelength Ellipsometer is right for your application is to perform demonstration measurements on your actual samples. Please contact us to discuss your application, and arrange for sample measurements.

Send Us Your Samples

As thin film applications are so varied and diverse, the best way to determine if a Film Sense Multi-Wavelength Ellipsometer is right for your application is to perform demonstration measurements on your actual samples. Please contact us to discuss your application, and arrange for sample measurements.

Connect With Us

Upcoming Events

AVS 67th International Exhibition

October 27 - October 29

Get IN touch

sales@film-sense.com

+1 (402) 937-9307

500 W South St, Ste 7
Lincoln, NE 68522 USA

Visit Us