MULTI-WAVELENGTH ELLIPSOMETER

3rd generation systems are now available!

The 3rd generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvement in this generation is the motorized source polarizer, which enables auto-calibration and zone-averaged measurements. The new systems offer the same benefits of the patented* FS-1 ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.

Gen. 3 Common Specifications

  • Compact optics: Source 142 x 80 x 60 mm, Detector 110 x 80 x 60 mm
  • Simple connections: +5V wall plug power supply, Ethernet, and Source-Detector link cables
  • Motorized Source Polarizer:
    – provides automated instrument calibration
    – enables zone-averaged measurements, for improved measurement accuracy
  • 4x more intensity (compared to original FS-1), and updated detector electronics provide improved measurement precision: 2x for ex situ, 4x for in situ

FS-1 Wavelengths

FS-1 Compact Footprint Ellipsometer

FS-1™ (Gen. 3) Ellipsometer

  • 4 wavelengths, 450 – 660 nm spectral range
    (replaces the original FS-1)
  • Excellent choice for measuring single layer transparent films in the 0 – 2 μm thickness range, with precision down to 0.0004 nm

 

 

*US Patent #9,354,118

FS-1EX™ (Gen. 3) Ellipsometer

  • 6 wavelengths, 405 – 950 nm spectral range
  • The 2 longer wavelengths (850 and 950 nm) enable the measurement of thicker transparent films (up to 5 μm), and absorbing semiconductor films (such as poly-Si, SiGe, amorphous-Si, etc.)
  • Film resistivity measurements (using the Drude model) are also improved with the 2 longer wavelengths.
  • 6 wavelengths and wider spectral range provide enhanced measurement capability for multilayer film stacks

Standard Ex Situ Configuration

  • 65° Angle of Incidence.
  • Manual sample loading and height adjustment.
  • Sample sizes up to 200 mm dia. and 20 mm in thickness.
  • Sample tilt with +/-2° range.
  • Beam size on sample: 4 x 9 mm.
  • Compact footprint (180 x 400 mm) and light (5 kg).
Ellipsometry diagram

Testimonials

“The FS1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. ”

Dr Ruy Sebastian Bonilla – Research Fellow
Oxford Materials Department

FS-1 Compact Footprint Ellipsometer

Focused Beam Ellipsometer Option

Fast and reliable thin film measurements in an easy-to-use, compact system. The Focus Beam option reduces beam size.
 

  • Reduces beam size on sample to 0.8 x 1.9 mm or 0.3 x 0.7 mm.

Send Us Your Samples

As thin film applications are so varied and diverse, the best way to determine if a Film Sense Multi-Wavelength Ellipsometer is right for your application is to perform demonstration measurements on your actual samples. Please contact us to discuss your application, and arrange for sample measurements.

Send Us Your Samples

As thin film applications are so varied and diverse, the best way to determine if a Film Sense Multi-Wavelength Ellipsometer is right for your application is to perform demonstration measurements on your actual samples. Please contact us to discuss your application, and arrange for sample measurements.

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Upcoming Events

AVS 67th International Exhibition

October 27 - October 29

Get IN touch

sales@film-sense.com

+1 (402) 937-9307

500 W South St, Ste 7
Lincoln, NE 68522 USA

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