Liquid Cell Option

Ellipsometric measurements in air and liquid ambients (“immersion ellipsometry”) are combined to provide more information and enhanced sensitivity for thin film characterization:

• Accurate index of refraction and thickness for very thin films (< 10 nm).  See our recent paper:  “Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples”
• n & k and Thickness for thin films, without a dispersion model

• Easy to use and fill, preferred liquid is water (non-toxic, readily available)
• Film Sense software supports the analysis of the combined data sets
• Compatible with most Film Sense Ellipsometer systems
  (ex situ only, may not be suitable for all samples)
• Contact Film Sense for a white paper describing the capabilities

Ellipsometric Measurements in Air and Water Ambients

Combined analysis: Cell with Air (CA)
and Cell with Liquid (CL) data sets